101 HeatWave Labs

Substrate Heaters

UHV Button Heaters, Model 101136, 101137 and 101138


#101136 shown
Complete specifications

Model 101275, Button Style 1000°C O2 Heaters


#101275-22


101275-28 Ø1/2" O2 Heater

101275-36 1200°C, Ø3.0" O2 Heater
Additional Specifications

Model 102746 Ø1.0" 1200°C Button Heater


#102746
Complete Specifications

Model 101511 Ø2" O2 Substrate Heater

 Additional Specifications

Standard Series Cartridge Heaters, 1200°C UHV Operation

 Complete specifications

Cartridge Heaters with Legs

 Complete specifications

Model 101572, Cartridge Style O2 Heater

 Additional Specifications

Model 101491 Heat Shield Assembly with Sample Clips


Model #101491-01, UHV

Complete Specifications

Model 101251 Heat Shield Assembly


#101251-01


101251-03 Ø1/2" 1200°C
UHV Heater with Shield
Complete Specifications

Model 101144-01, 1200°C UHV Ionizer / Stub Heater

 Complete Specifications

Model 101149, 1200°C UHV Ionizer Heater

 Complete Specifications

Model 101270, 1200°C UHV Stub Heater

 Complete Specifications

Model 101269, 1200°C UHV Stub Heater

 Complete Specifications

Model 101422 Ø1.0" ID Ionizer Heater

 Complete Specifications

Model 101448, Ø1.0" ID Ionizer Heater

 Complete Specifications

Model 101423 Shielded sample heater

  • Ø.600, 1200°C UHV operation
  • Ion Source without emitter button
  • Allows user to install emitter or use only as sample heater
  • 3.9V, 7.7A @ 900°C
    5.8V, 11.2A @ 1100°C
    7.0V, 12.9A @ 1200°C
  • Non-inductive bifilar heater
  • Available with optional heat shielding
    (as shown in picture)

Model 101316, 1000°C O2 Sample Stub Heater

 Additional Specifications

Model 101525 1700°C Mini Furnace


101525 Mini Furnace

Section View of 101525
Complete Specifications

Model 103972 Ø1.0" Low Profile O2 Heater


#103972
Complete Specifications

Model 104809 Ø1.0" 1000°C O2 Button Heater


#104809
Complete Specifications

Model 102559 1" Heater/Shield Assembly with Isolated Clips


#102559
Complete Specifications

Model 101868 Ø2.0" UHV Heater Assembly


#101868 Shown with optional sample window

Cut Away View
Complete specifications

Model 101446 Ø2" O2 Heater with Sample Clips


Shown without top heat shield and with metal diffuser plate
Complete Specifications

Model 102940 Ø2" O2 Low Profile Heater with Sample Clips


Shown standard, above and with optional water cooled base as #102931, below
Additional Specifications

Model 101089, Ø2.0", 1200°C UHV Low Profile Heater


Shown with optional
side lead location

Typical operation:
550 Watts maximum
13V, 15A @ 1000°C
23V, 16A @ 1200°C

Complete Specifications

Model 101920 Ø2.0", 1200°C UHV Heater


shown with optional
mounting stem #101874


shown with optional
mounting stem #101874

Section View
Complete Specifications

Model 103747 Ø2.0" O2 Heater, High Power


#103747
Complete Specifications

Model 103143 Ø2.0" O2 1000°C Wafer Heater


#103143
Complete Specifications

Model 106406 Ø3.0" O2 Heater Assembly


#106406
Water inlet/outlet not shown for clarity
Complete Specifications

Model 106405 Custom Ø3.0" 1200°C UHV Heater


#106405 shown without outer alumina shield tube
and without GPHS or MLI samples
Complete Specifications

Model 105638 Ø3.0" 1200°C UHV Heater Assembly


#105638
Complete Specifications

Model 101710 4 inch Heater/Shield Assembly


 Specifications

Model 102263 Ø4"UHV Heater


#102263
Additional Specifications

Model 102675 Ø4" 1000°C O2 Heater with Shields


#102675
Complete Specifications

Model 103164 Ø4.0" 1200°C O2 Wafer Heater


#103164
Complete Specifications

Model 102193 Ø3", O2 Heater


#102193 Ø3" O2 heater with
standard shield housing
Additional Specifications

Model 102717 Ø4", 1200°C, UHV Heater


#102717 Ø4" 1200°C UHV Heater
with Heat Shields and Sample Clips
Additional Specifications

Model 102104 Ø4", 1100°C, UHV Heater


#102104 Ø4" 1100°C UHV Heater
with shield and TC
Additional Specifications

Model 101290, Ø4.0" 1200°C UHV Heater

Model 102834 Ø4.0" O2 1000°C Heater


#102834
Complete Specifications

Model 107338 Ø4.0" UHV Heater Assembly


#107338 shown without (left) and
with (right) diffuser plate
Complete Specifications

Model 103569 Ø4.0 1000°C O2 Sealed Heater


#103569


#103595 heater sub assembly
Complete Specifications

Model 103095 Ø4.00" UHV Wafer Heater


#103095
Complete Specifications

Model 104027 Ø4.0" 1000°C Sealed Heater Assembly


#104027
Complete Specifications

Model 104454 Ø4.0" 1200°C UHV Heater


#104454
Complete Specifications

Model 104711 Ø4.0" 1000°C Sealed Heater Assembly


#104711
Complete Specifications

Model 107483 Ø4.0" O2 Sealed Heater Assembly


#107483
Complete Specifications

Model 105487 Ø4.0" Wafer Heater


#105487
Complete Specifications

Model 102322 Ø4.0 1200°C UHV Heater


#102322
Complete Specifications

Model 104524 Ø4.15" 1200°C UHV Heater


#104524
Complete Specifications

Model 104026 Ø6.0" 1000°C Sealed Heater Assembly


#104026 power and thermocouple leads
hidden for clarity
Complete Specifications

Model 103456 Ø6.0" 1200°C UHV Wafer Heater


#103456
Complete Specifications

Model 104066 Ø6.0" 1200°C UHV Wafer Heater


#104066
Complete Specifications

Model 106911 Ø6.0" Sealed O2 Heater Assembly


#106911
Complete Specifications

Model 103272 Ø6.0" UHV Wafer Heater


#103272
Complete Specifications

Model 101186, Ø8.00" 1200°C UHV Heater


#101186 Ø8" 1200°C UHV wafer
heater on shield/mount assembly
 Complete specifications

Model 102436 Ø8" 1000°C Heater Assembly
On X-Y-Z Axis Manipulator


102436 Shown without outer heat shield

102435 X-Y-Z Manipulator
Complete Specifications (#102436)

Model 103904 Ø1/2" 1200°C Flange Mounted Heater


#103904
Complete Specifications

Model 104540 Ø0.5" 1200°C UHV Heater on NW40 KF Flange


#104540
Complete Specifications

Models 102774 (UHV) and 102775 (O2) 1200°C, Ø1/2" Button Heater on CF flange


#102774 shown (UHV heater)


#102775 shown (O2 heater)
Complete Specifications (#102774)
Complete Specifications (#102775)

Model 104827 Ø0.5" 1200°C UHV Heater on KF-40 Flange


#104827
Complete Specifications

Model 102504 Flange Mounted Ø0.5" 1200°C O2 Heater


#102504


Closeup of heaterend
Complete Specifications

Model 102172 Ø1/2" UHV Heater on 2 3/4" CFF


#102172 Ø1/2" UHV Heater
Additional Specifications

Model 105034 Ø0.5" 1200°C UHV Heater on CF Flange


#105034
Complete Specifications

Model 102199 Ø1/2" UHV Heater With 15° Tilt


#102199 Ø1/2" UHV Heater
Additional Specifications

Model 107759 Ø0.75" UHV Button Heater on CF Flange


#107759
Complete Specifications

Model 104760 Ø1.0" 1200°C UHV Heater on 4.5" CF


#104760
Complete Specifications

Model 104363 Ø1.0" 1000°C O2 CFF Mounted Heater


#104363
Complete Specifications

Model 103536 Ø 1.0" 1200°C UHV Heater on NW50 Flange


#103536
Complete Specifications

Model 103039 Ø1.0" 1200°C UHV Heater


#103039
Complete Specifications

Model 102644 1" 1200C UHV Heater On 2 3/4" CFF with Z adjust


#102644. Note coiled power and TC
wires allow for +/- 0.75" vac side Z
adjustment
Additional Specifications (#102916)

Model 106847 Ø1.0" 1200°C UHV Heater on CF Flange


#106847
Complete Specifications

Model 103896 Ø1.0" 1200°C O2 Heater


#103896


#103960 water cooled chamber for #103896
Complete Specifications

Model 103257 Ø1.0" 1200°C O2 Heater


#103257
Complete Specifications

Model 103079 Ø1.0" 1200°C Heater on 2 3/4" CF Flange


#103079-02 Ø1" O2 Button Heater
Complete Specifications

Model 103059 Ø2.0" UHV Heater on 4 1/2" CFF


#103059
Complete Specifications

Model 104192 Ø2.0" 1200°C Heater Assembly


#104192-03
Complete Specifications

Model 106337 Ø2.0" O2 Heater on Ø6" CF Flange


#106337
Complete Specifications

Model 102480 1" 1200C O2 Heater with Bias on 32" long mount


#102480 shown without stem extension (above)
and with stem extension (below)

Specifications

Model 104200 Ø1.0" 1200°C O2 Heater in Water Cooled Housing


#104203 shown separated from (above) and connected to (below)
power, thermocouple and coolant connections
Complete Specifications

Model 106961 Ø1.0" O2 2-Zone Heater Assembly


#106961
Complete Specifications

Model 105305 Ø1.0" Sealed UHV Heater


#105305
Complete Specifications

Model 102140 Ø1" O2 Heater


#102140 Ø1" O2 Heater in #101491 housing
Additional Specifications

Model 101339, Ø2.00", 1200°C UHV Low Profile Heater on CFF


Heater shown mounted on CF Flange with support,
thermocouple and power/TC feedthrus

Complete Specifications

Model 104115 Ø2.0" 1000°C Flange Mounted Heater with Bias


#104115
Complete Specifications

Model 104192 Ø2.0" 1000°C O2 Heater


#104192
Complete Specifications

Model 103895 Ø2.0" 1200°C O2 Heater


#103895
Complete Specifications

Model 106919 Ø2.0" UHV Heater Assembly


#106919
Complete Specifications

Models 104248 and 104241 Ø3" 1200°C Heater Assembly


#104248


#104248 heater/shield assembly
CF flange mounted to be 104241
Complete Specifications (#104241)
Complete Specifications (#104248)

Model 103452 Ø4.0" 1200°C Sealed Heater


#103452 shown on optional custom multi-port flange
with fan cooling (ref #103454)
Complete Specifications (#103452)
Complete Specifications (#103454)

Model 101980 Ø4" O2 Heater


#101980 Ø4" O2 Heater
Specifications

Model 105129 Ø4.0" Sealed Moly Heater


#105129
Complete Specifications

Model 103891 Ø4.25" 1000°C Heater with Shields and Lift Pin Holes


#103891
Complete Specifications

Model 105656 Ø6.0" 1100°C Sealed Wafer Heater


#105656 shown without customer supplied
gas purge plate
Complete Specifications

Model 104486 Ø6" O2 Heater Assembly


#104486 Ø6" O2 Heater Water Cooled mounted on 12 CFF
Complete Specifications

Model 101754 Complete Heater Assembly


#101754

Specifications

Model 104067 Custom Heat Zone with Purge


#104067
Complete Specifications

Model 105032 Sample Heater on Custom Multi-Feedthru CF Flange


#105032
Complete Specifications

Model 102514 1" Sample Stage and 102515 1" 1200°C UHV Heater Dock Assembly


#102514 Heater/mount assembly
shown with #102515 sample stage
Additional Specifications

Model 102916 2" Sample Stage and 102915 2" 1200°C O2 Heater Dock Assembly


#102915 Heater/mount assembly
shown with #102916 sample stage
Additional Specifications (#102915)
Additional Specifications (#102916)

Model 103273 Ø0.5" 1200°C UHV Heater on Z Stage


#103273
Complete Specifications

Model 103838 Ø0.5" 1200°C UHV Heater on Custom Stage


#103838


Back view showing grab point
Complete Specifications

Model 106604 Ø0.5" O2/UHV Heated Dock


#106604-02
Complete Specifications

Model 104789 Ø.50" 1200°C UHV Heater on Bellows Mount


#104789
Complete Specifications

Model 105080 Ø0.5" 1000°C O2 Heated Stage


#105080
Complete Specifications

Model 103774 Ø1.0" O2 1200°C Heater Dock and Stage


#103792 dock/heater (left) shown
with #103775 stage (right)
Complete Specifications

Model 106288 Ø1.0" UHV Heated Dock/Stage on CF Flange


#106288
Complete Specifications

Model 104006 Ø1.0" 1200°C UHV Heater on +/- Rotation Stage


#103663
Complete Specifications

Model 107515 Ø1.0" 1200°C O2 Heater Assembly


#107515
Complete Specifications

Model 104759 Ø1.0" 1200°C UHV Heater on Manual Rotation Feedthru


#104759 with shield and aperture installed
Complete Specifications

Model 105227 Ø2.0" 1200°C UHV Heater on Pneumatic Z Stage


#105227
Complete Specifications

Model 103130 Ø2.0" 1200°C O2 Heater on Flange


#103130
Complete Specifications

Model 103663 Ø2.0" 1200°C UHV Heater


#103663
Complete Specifications

Model 105525 Ø2" 1000°C O2 Heated Dock/Stage with Z Stage


#105525
with #102514 dock and #102515 stage inserted
Complete Specifications

Model 103621 Ø2.0" 1200°C UHV Dock/Stage on Ø8" CFF


#103621
Complete Specifications

Model 106143 Ø2.0" O2 heater with +/- Rotation


#106143
Complete Specifications

Model 102671 Ø2.0" 1200°C O2 Heater on X-Y-Z Stage


#102671


#102671 heater closeup
Complete Specifications

Model 106184 Ø3.0" O2 Heater on Ø8" CF Flange with 4" Z Translator


#106184 shown without customer supplied
graphite sample cup
Complete Specifications

Model 103159 Ø5.00" 1000°C O2 Heater


#103159 shown with carrier for 4 Ø2" wafers
Complete Specifications

Model 104080 Ø0.8" 1200°C UHV Button Heater


#104080


#105031
Complete Specifications (#104080)
Complete Specifications (#105031)

Model 106338 Ø0.8" UHV Heater


#106338
Complete Specifications

Model 102561 Ø1.0" O2 Button Heater


#102561
Complete Specifications

Model 102335 Ø1.50" 1200°C UHV Button Heater


#102335
Complete Specifications

Models 101483 and 101464 UHV ESCA Stub Heaters


#101483 shown


#101464 shown
Complete Specifications (#101483)
Complete Specifications (#101464)

Model 102767 Ø0.6" UHV Heater


#102767
Complete Specifications

Model 102198 1200°C UHV Substrate Heater


Model 102198

Specifications

Model 101973 1200°C UHV Heater with Flat Package


#101973
Complete Specifications

Model 101463 Sample Heater Assembly

Model 101461, 1200°C UHV Button Heater

 Complete Specifications

Model 101434 Flanged Sample Heater

Model 108268 Ø0.5" Shielded Heater Assembly


#108268
Complete Specifications

Model 107887 Ø0.5" O2 Heater Assembly


#107887 Customer's circuit board
mount not shown
Complete Specifications

Model 103681 Ø1.0" 1200°C O2 Heater with Ø0.25" Thru Hole


#103681
Complete Specifications

Model 104708 Ø1.0" 1200°C UHV Heater with Mounting Stem


#104708
Stem cropped for clarity
Complete Specifications

Model 105354 Ø1.80" UHV Moly Sealed Heater


#105354
Complete Specifications

Models 103754 and 103808 Ø2.0" 1000°C Sealed O2 Heater Assembly


#103754 (left, without mounting arm and with optional thermocouple)
and #103808 sealed heater only (right)
Complete Specifications (#103754)
Complete Specifications(#103808)

Model 103894 Ø2.0" O2 Heater with Aperture Shield


#103849 shown
Complete Specifications

Model 102536 Ø2.0" 1200°C O2 Heater


#102563
Complete Specifications

Model 103294 Ø2.0 1000°C O2 Heater


#103294
Complete Specifications

Model 102927 Ø2.12" 1000°C O2 Sealed Heater


#102927
Complete Specifications

Model 103411 Ø2.625" 1000°C Differentially Pumped Heater


#103411
Complete Specifications

Model 105750 Ø1.0" 500°C UHV Heater Assembly


#105750
Complete Specifications

Model 104551 Custom Ø3.0" Copper Heater Assembly


#104551
Complete Specifications

Model 102939 Tantalum Sheath Heater


#102939
Complete Specifications

Model 101400, 600°C O2 Custom Tensile Test Heater

 Complete specifications (#101400)

Model 103890 Ø1.60" 1200°C O2 Heater


#103890 shown mounted in customer
supplied quartz housing
Complete Specifications

Model 107350 Ø1.0" Copper Cathode/Heater Assembly


#107350
Complete Specifications

Model 101359, 900°C O2 Heater

Model 105111 Ø1.25" 800°C O2 Heater


#105111
Complete Specifications

Model 106238 Ø0.25" UHV Heater Tube


#106238
Complete Specifications

Model 106881 Ø0.375" UHV/O2 Heated Tube


#106881
Complete Specifications

Model 101509 UHV Heater With Base


Model #101509

Side View, Cut-Away
Complete specifications

Model 101620 3 Zone, Ø4.0" Low Profile Heater Assembly


#101620
Complete Specifications

Model 102262 Liquid Cooled Hollow Heater


#102262 (sample clips not shown)


#102262 with liquid cooled shield housing detached
Complete Specifications

Model 102192 Custom 1200°C O2 Heater


102192 Heater Assembly
Additional Specifications

Model 106561 Ø2.0" O2 Heater Assembly


#106561
Complete Specifications

Model 107766 Custom Rectangular O2 Heater


#107766
Complete Specifications

Model 101292, 3" x 3" 1000°C Custom O2 Heater

#101292
Complete specifications

Model 101496 Panel Heater

Model 101162, 1100°C O2 Custom Furnace

 Complete specifications

Model 106059 Ø.395 1200°C UHV Sample Heater


#106059
Complete Specifications

Model 106875 Ø1.0" 1200°C O2 Heater Assembly in 4 1/2" CF Tee


#106875
Complete Specifications

Model 105558 Custom 2-Zone Lithium Furnace


#105558 shown without outer shield
Complete Specifications

Custom Furnaces and Chambers, Model 101757, 101693


Model 101757, 8" CFF, 1200°C


Model 101693, Ø2", 800°C,
Water cooled
Complete specifications

Model 101053 Hollow Cathode


101053 Hollow Cathode

101053 Hollow Cathode without shield
  • Type 61280 emitter
  • Indirectly heated
  • Plasma spray Alumina heater insulation
  • Bifilar non-inductive heater
  • 1/8" gas port
  • Shown without heat shield and keeper electrode


Close-up of heater/tube

Complete specifications

Pancake Filament Heaters

Crucible Heaters

Reference Documents

TB-169 Temperature control centers

TB-212 Specifying Sample and Wafer Heaters

TB-205 DFP-2000 optical pyrometers

TB-203 Photoscreenic Wedge optical pyrometers

TB-197 Micro-therm optical pyrometers

TB-123 Design Concepts for High Temperature Cathode and UHV Sample Heater Packages