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Substrate Heaters

UHV Button Heaters, Model 101136, 101137 and 101138

 Complete specifications

Model 101491 Heat Shield Assembly with Sample Clips


Model #101491-01, UHV

Complete Specifications

Model 101446 O2 Heater with Sample Clips


Shown without top heat shield
Complete Specifications

Model 102940 O2 Low Profile Heater with Sample Clips


Shown standard, above and with optional water cooled base as #102931, below
Additional Specifications

Model 101275, Button Style 1000°C O2 Heaters


#101275-22


101275-28 Ø1/2" O2 Heater

101275-36 1200°C, Ø3.0" O2 Heater

Model 101511 O2 Substrate Heater

Model 101572, Cartridge Style O2 Heater

Model 101316, 1000°C O2 Sample Stub Heater

Custom 1200°C O2 Heater


102192 Heater Assembly

Model 102172 Ø1/2" UHV Heater on 2 3/4" CFF


#102172 Ø1/2" UHV Heater

Model 102199 Ø1/2" UHV Heater With 15° Tilt


#102199 Ø1/2" UHV Heater

Model 102193 Ø3", O2 Heater


#102193 Ø3" O2 heater with
standard shield housing

Model #102104 Ø4", 1100°C, UHV Heater


#102104 Ø4" 1100°C UHV Heater
with shield and TC

Model #102717 Ø4", 1200°C, UHV Heater


#102717 Ø4" 1200°C UHV Heater
with Heat Shields and Sample Clips

Model #102140 Ø1" O2 Heater


#102140 Ø1" O2 Heater in #101491 housing

Model #102263 Ø4"UHV Heater


#102263

Model #102232 Ø1" O2 Button Heater


#102232 Ø1" O2 Button Heater

Model #102514 1" Sample Stage and #102515 1" 1200°C UHV Heater Dock Assembly


#102514 Heater/mount assembly
shown with 102515 sample stage

Model #102916 2" Sample Stage and #102915 2" 1200°C O2 Heater Dock Assembly


#102915 Heater/mount assembly
shown with #102916 sample stage

Model 102644 1" 1200C UHV Heater On 2 3/4" CFF with Z adjust


#102644. Note coiled power and TC wires allow for +/- 0.75" vac side Z adjustment

Model 102480 1" 1200C O2 Heater with Bias on 32" long mount


#102480 shown without stem extension (above) and with stem extension (below)

Model 102198 1200°C UHV Substrate Heater


Model 102198

Model 101754 Complete Heater Assembly


#101754

Model 101710 4 inch Heater/Shield Assembly


101710 with TC Installed
Specifications

Model 101980 Ø4" O2 Heater


#101980 Ø4" O2 Heater

Standard Series Cartridge Heaters

 Complete specifications

Cartridge Heaters with Legs

 Complete specifications

Model 101251 Heat Shield Assembly


#101251-01


101251-03 Ø1/2" 1200°C
UHV Heater with Shield
Complete Specifications

Model 101089, Ø2.0", 1200°C UHV Low Profile Heater


Shown with optional
lead location

Typical operation:
550 Watts maximum
13V, 15A @ 1000°C
23V, 16A @ 1200°C

Model 101339, Ø2.00", 1200°C UHV Low Profile Heater


Heater shown mounted on CF Flange with support,
thermocouple and power/TC feedthru

Model 101920 Ø2.0", 1200°C UHV Heater


shown with optional
mounting stem #101874


shown with optional
mounting stem #101874

Section View

Model 101868 Ø2.0" UHV Heater Assembly


#101868 Shown with optional sample window

Cut Away View
Complete specifications

Model 101290, Ø4.0" 1200°C UHV Heater

Model #104486 Ø6" O2 Heater Assembly


#104486 Ø6" O2 Heater Water Cooled mounted on 12 CFF

Model 102436 Ø8" 1000°C Heater Assembly
On X-Y-Z Axis Manipulator


102436 Shown without outer heat shield

102435 X-Y-Z Manipulator

Model 101186, Ø8.00" 1200°C UHV Heater


#101186 Ø8" 1200°C UHV wafer
heater on shield/mount assembly

Model 101270, 1200°C UHV Stub Heater

Model 101144-01, 1200°C UHV Ionizer / Stub Heater

Model 101525 1700°C Mini Furnace


101525 Mini Furnace

Section View of 101525

Model 101448, Ø1.0" ID Ionizer Heater

Model 101422 Ø1.0" ID Ionizer Heater

Model 101461, 1200°C UHV Button Heater

Model 101434 Flanged Sample Heater

Model 101483 and 101464 UHV ESCA Stub Heaters


Model 1483 shown

Model 101463 Sample Heater Assembly

Model 101269, 1200°C UHV Stub Heater

Model 101149, 1200°C UHV Ionizer Heater

Model 101423 Shielded Sample Heater

Model 101509 UHV Heater With Base


Model #101509

Side View, Cut-Away
Complete specifications

Model 101053 Plasma Sprayed Filament

  • Plasma spray Alumina insulation
  • Spray coated to Ø1/8" Moly tube
  • Bifilar heater filament

Model 101359, 900°C O2 Heater

Model 101400, 600°C O2 Custom Tensile Test Heater

Model 101162, 1100°C O2 Custom Furnace

Custom Furnaces and Chambers, Model 101757, 101693


Model 101757, 8" CFF, 1200°C


Model 101693, Ø2", 800°C,
Water cooled
Complete specifications

Model 101292, 3" x 3" 1000°C Custom O2 Heater

Model 101496

Pancake Filament Heaters

Crucible Heaters

Reference Documents

TB-169 Temperature control centers

TB-212 Specifying Sample and Wafer Heaters

TB-205 DFP-2000 optical pyrometers

TB-203 Photoscreenic Wedge optical pyrometers

TB-197 Micro-therm optical pyrometers

TB-123 Design Concepts for High Temperature Cathode and UHV Sample Heater Packages

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