High Temperature Substrate Heaters

The Sub-Categories below are all related to High Temperature Heaters. Select any category for complete product specifications.

UHV and O2 Substrate Heaters

Larger Wafer Heaters

Flange-Mounted Heaters

Dock/Stage and Motion

Special/Custom Heater Assemblies


Temperature Controller/Power Supplies

  • All current and voltage ranges
  • Phase angle control
  • Front panel or remote computer interface
  • Programmable ramp, soak, etc.
  • Type K thermocouple
  • RS232 interface


  • Grids
  • Hook up leads
  • Flanges
  • Pyrometers
  • Insulators, Fish Spine beads
  • Shims, couplings
  • Mo, W, Ta and SST hardware