High Temperature Substrate Heaters
The Sub-Categories below are all related to High Temperature Heaters. Select any category for complete product specifications.
UHV and O2 Substrate Heaters
Larger Wafer Heaters
Flange-Mounted Heaters
Dock/Stage and Motion
Special/Custom Heater Assemblies
Filaments
Temperature Controller/Power Supplies
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- All current and
voltage ranges
- Phase angle control
- Front panel or remote
computer interface
- Programmable
ramp, soak, etc.
- Type K thermocouple
- RS232 interface
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Accessories
- Grids
- Hook up leads
- Flanges
- Pyrometers
- Insulators, Fish Spine beads
- Shims, couplings
- Mo, W, Ta and SST hardware
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