High Temperature Substrate Heaters

UHV and O2 Substrate Heaters Up to 1200°C Operation in UHV or Reactive atmospheres Non gassy Available from stock Small Button to large area wafer heaters Temperature controllers

Wound Filaments Tungsten, Molybdenum, Th/W, Re/W, Ce/W, La/W, Ta, Ir, etc. Bifilar, single coil, coaxial, toroid, pancake, coiled-coil Catephoretic coated or metal coated

Temperature Controller /Power Supplies All current and voltage ranges Phase angle control Front panel or remote computer interface Programmable ramp, soak, etc. Type K thermocouple RS232 interface

Accessories Grids Hook up leads Flanges Pyrometers Insulators, Fish Spine beads Shims, couplings Mo, W, Ta and SST hardware